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Micromechanical Photonics

Ukita, Hiroo.

Micromechanical Photonics [electronic resource] / by Hiroo Ukita. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2006. - xi, 250 p. : ill., digital ; 25 cm - Microtechnology and Mems, 1615-8326 .

ISBN: 9783540313724 (electronic bk.) 9783540313335 (paper)

Subjects--Topical Terms:
Photonics.
Microelectronics.
Microelectromechanical systems.

LC Class. No.: TA1520 / .U35 2006

Dewey Class. No.: 621.36

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Micromechanical Photonics

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