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Gettering Defects in Semiconductors

Perevoschikov, Victor A..

Gettering Defects in Semiconductors [electronic resource] / by Victor A. Perevoschikov, Vladimir D. Skoupov. - Berlin, Heidelberg : Springer Berlin Heidelberg, 2005. - xv, 386 p. : ill., digital ; 25 cm. - Springer Series in Advanced Microelectronics, 19 1437-0387 ; .

ISBN: 9783540294993 (electronic bk.) 9783540262442 (paper)

Subjects--Topical Terms:
Semiconductors--Defects.
Semiconductors--Materials.
Getters.
Chemistry.
Optical and Electronic Materials.
Industrial Chemistry/Chemical Engineering.

LC Class. No.: QC611.6.D4 / P4713 2005

Dewey Class. No.: 621.38152

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Gettering Defects in Semiconductors

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