Integrated Chemical Microsensor Systems in CMOS Technology
Hierlemann, Andreas.
Integrated Chemical Microsensor Systems in CMOS Technology [electronic resource] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - ix, 229 p. : ill., digital ; 25 cm. - Microtechnology and MEMS, 1615-8326 .
9783540273721 (electronic bk.) 9783540237822 (paper)
Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Sensorimotor integration.
Chemistry.
Optical and Electronic Materials.
Nanotechnology.
Surfaces and Interfaces, Thin Films.
Electronics and Microelectronics, Instrumentation.
Analytical Chemistry.
Measurement Science, Instrumentation.
TK7875 / .H54 2005
621.39732
Integrated Chemical Microsensor Systems in CMOS Technology [electronic resource] / by Andreas Hierlemann ; edited by H. Baltes, Hiroyuki Fujita, Dorian Liepmann. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - ix, 229 p. : ill., digital ; 25 cm. - Microtechnology and MEMS, 1615-8326 .
9783540273721 (electronic bk.) 9783540237822 (paper)
Metal oxide semiconductors, Complementary.
Microelectromechanical systems.
Sensorimotor integration.
Chemistry.
Optical and Electronic Materials.
Nanotechnology.
Surfaces and Interfaces, Thin Films.
Electronics and Microelectronics, Instrumentation.
Analytical Chemistry.
Measurement Science, Instrumentation.
TK7875 / .H54 2005
621.39732