Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures /
Fruhauf, Joachim.
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Fruhauf. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - xii, 221 p. : ill., digital ; 24 cm.
9783540268765 (electronic bk.) 9783540221098 (paper)
Silicon.
Detectors.
Chemistry.
Optical and Electronic Materials.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Electronics and Microelectronics, Instrumentation.
Industrial Chemistry/Chemical Engineering.
QC611.8.S5 / F48 2005
620.193
Shape and Functional Elements of the Bulk Silicon Microtechnique A Manual of Wet-Etched Silicon Structures / [electronic resource] : by Joachim Fruhauf. - Berlin, Heidelberg : Springer-Verlag Berlin Heidelberg, 2005. - xii, 221 p. : ill., digital ; 24 cm.
9783540268765 (electronic bk.) 9783540221098 (paper)
Silicon.
Detectors.
Chemistry.
Optical and Electronic Materials.
Ceramics, Glass, Composites, Natural Methods.
Microwaves, RF and Optical Engineering.
Electronics and Microelectronics, Instrumentation.
Industrial Chemistry/Chemical Engineering.
QC611.8.S5 / F48 2005
620.193