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Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies / [electronic resource] : edited by Rainer Behrisch, Wolfgang Eckstein. - Berlin Heidelberg : Springer-Verlag GmbH., 2007. - xvii, 507 p. : ill. (some col.), digital ; 21 cm. - Topics in Applied Physics, 110 0303-4216 ; .

ISBN: 9783540445029 (electronic bk.) 9783540445005 (paper)

Subjects--Topical Terms:
Sputtering (Physics).
Chemistry.
Atoms and Molecules in Strong Fields, Plasma Physics.
Surfaces and Interfaces, Thin Films.

LC Class. No.: QC176.8.S72 / S685 2007

Dewey Class. No.: 530.416

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Sputtering by Particle Bombardment Experiments and Computer Calculations from Threshold to MeV Energies /

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