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Design and fabrication of small size and high sensitivity MEMs capacitive microphone /

Ganji, Bahram Azizollah

Design and fabrication of small size and high sensitivity MEMs capacitive microphone / Bahram Azizollah Ganji - Bangi : Institut Kejuruteraan Mikro dan Nanoelektronik, Universiti Kebangsaan Malaysia, 2007 - xxii , 255 p. : ill. ; 30 cm.

Thesis (Ph.D) - Universiti Kebangsaan Malaysia, 2007

References : p. [207]-214

ISBN: Hadiah

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Microelectromechanical systems
Microphone
Dissertations, Academic--Malaysia

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Design and fabrication of small size and high sensitivity MEMs capacitive microphone /

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