Smart MEMS and sensor systems /

Gaura, Elena

Smart MEMS and sensor systems / Elena Gaura & Robert Newman - London : Singapore ; Hackensack, NJ : Imperial College Press ; Distributed by World Scientific Pub. Co., 2006 - xii, 539 p. : ill. ; 24 cm.

Includes bibliographical references and index

1860944930 RM448.02


Microelectromechanical systems
Smart structures

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