Smart MEMS and sensor systems /
Gaura, Elena
Smart MEMS and sensor systems / Elena Gaura & Robert Newman - London : Singapore ; Hackensack, NJ : Imperial College Press ; Distributed by World Scientific Pub. Co., 2006 - xii, 539 p. : ill. ; 24 cm.
Includes bibliographical references and index
1860944930 RM448.02
Microelectromechanical systems
Smart structures
Smart MEMS and sensor systems / Elena Gaura & Robert Newman - London : Singapore ; Hackensack, NJ : Imperial College Press ; Distributed by World Scientific Pub. Co., 2006 - xii, 539 p. : ill. ; 24 cm.
Includes bibliographical references and index
1860944930 RM448.02
Microelectromechanical systems
Smart structures
