Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering /
Lyshevski, Sergey Edward
Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - Boca Raton : CRC Press, 2005 - 722 p. : ill. ; 26 cm. - Nano- and microscience, engineering, technology, and medicine series ; 8 .
Includes bibliographical references and index
0849328381 (alk. paper) RM232.81
Microelectromechanical systems
Nanotechnology
Nano- and micro-electromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - 2nd ed. - Boca Raton : CRC Press, 2005 - 722 p. : ill. ; 26 cm. - Nano- and microscience, engineering, technology, and medicine series ; 8 .
Includes bibliographical references and index
0849328381 (alk. paper) RM232.81
Microelectromechanical systems
Nanotechnology