Micro electro mechanical system design /
Allen, James J.
Micro electro mechanical system design / James J. Allen - Boca Raton : Taylor & Francis, 2005 - 465 p. : ill. ; 23 cm. - Mechanical engineering ; 192 . - Mechanical engineering (Taylor & Francis) ; 192 .
Includes bibliographical references and index
0824758242 (alk. paper) RM598.40 0824758242 (alk. paper) RM598.58
Microelectromechanical systems--Design and construction
Engineering design
Micro electro mechanical system design / James J. Allen - Boca Raton : Taylor & Francis, 2005 - 465 p. : ill. ; 23 cm. - Mechanical engineering ; 192 . - Mechanical engineering (Taylor & Francis) ; 192 .
Includes bibliographical references and index
0824758242 (alk. paper) RM598.40 0824758242 (alk. paper) RM598.58
Microelectromechanical systems--Design and construction
Engineering design