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Kesan penipisan wafer terhadap keutuhan mekanikal wafer silikon dan proses pemotongan /

Hoh, Huey Jiun

Kesan penipisan wafer terhadap keutuhan mekanikal wafer silikon dan proses pemotongan / Hoh Huey Jiun - Bangi : Fakulti Kejuruteraan, Universiti Kebangsaan Malaysia, 2006 - xvi, 122 p. : ill. ; 30 cm.

Tesis (Sarjana Sains) - Universiti Kebangsaan Malaysia, 2006

Rujukan : p. 114 - 122

Subjects--Corporate Names:
Universiti Kebangsaan Malaysia--Dissertations

Subjects--Topical Terms:
Dissertations, Academic--Malaysia
Semiconductor wafers--Design and construction
Semiconductor
Integrated circuits

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Kesan penipisan wafer terhadap keutuhan mekanikal wafer silikon dan proses pemotongan /

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