The MEMS handbook /
The MEMS handbook /
edited by Mohamed Gad-el-Hak.
- 2nd ed.
- Boca Raton : CRC/Taylor & Francis, 2006.
- 3 v. : ill. ; 26 cm.
- Mechanical engineering series. .
Includes bibliographical references and index.
Introduction and fundamentals - Design and fabrication - Applications. volume 1. volume 2. volume 3.
0849391377 (v. 1) RM366.05 0849391385 (v. 2) RM366.05 0849391393 (v. 3) RM366.05
Mechanical engineering--Handbooks, manuals, etc.
Microelectromechanical systems.
Microelectronics.
Nanotechnology.
Includes bibliographical references and index.
Introduction and fundamentals - Design and fabrication - Applications. volume 1. volume 2. volume 3.
0849391377 (v. 1) RM366.05 0849391385 (v. 2) RM366.05 0849391393 (v. 3) RM366.05
Mechanical engineering--Handbooks, manuals, etc.
Microelectromechanical systems.
Microelectronics.
Nanotechnology.