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Foundations of MEMS /

Liu, Chang

Foundations of MEMS / Chang Liu - Upper Saddle River, NJ : Pearson/Prentice Hall, 2006 - xxii, 530 p. : ill. ; 25 cm.

Includes bibliographical references and index

ISBN: 0131472860 RM435.42

Subjects--Topical Terms:
Microelectromechanical systems

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