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Microengineering, MEMS, and interfacing : a practical guide /

Banks, Danny

Microengineering, MEMS, and interfacing : a practical guide / Danny Banks - Boca Raton, FL : CRC/Taylor & Francis, 2006 - 326 p. : ill. ; 24 cm. - Mechanical engineering ; 199 .

Includes bibliographical references and index

ISBN: 0824723058 (alk. paper) RM551.13

Subjects--Topical Terms:
Microelectromechanical systems

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Microengineering, MEMS, and interfacing : a practical guide /

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