MEMS/MOEMS packaging : concepts, designs, materials, and processes /
Gilleo, Ken
MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo - New York : McGraw-Hill, 2005 - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .
Includes bibliographical references (p. 203-213) and index
0071455566 RM580.80
Microelectronic packaging
Microelectromechanical systems
Optoelectronic devices
MEMS/MOEMS packaging : concepts, designs, materials, and processes / Ken Gilleo - New York : McGraw-Hill, 2005 - xiii, 220 p. : ill. ; 24 cm. - McGraw-Hill nanoscience and technology series .
Includes bibliographical references (p. 203-213) and index
0071455566 RM580.80
Microelectronic packaging
Microelectromechanical systems
Optoelectronic devices