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Materials science in microelectronics /

Machlin, E. S.

Materials science in microelectronics / E.S. Machlin - 2nd ed. - Amsterdam : Elsevier, 2005- - 1 v. : ill. ; 24 cm.

Includes index

The relationships between thin film processing and structure vol. 1.

ISBN: 008044640X (v. 1) RM575.85

Subjects--Topical Terms:
Thin films
Microelectronics

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