The science and engineering of microelectronic fabrication /
Campbell, Stephen A., 1954-
The science and engineering of microelectronic fabrication / Stephen A. Campbell - 2nd ed. - New York : Oxford University Press, 2001 - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index
0195136055 RM84.90
00-051022
Semiconductors--Design and construction
The science and engineering of microelectronic fabrication / Stephen A. Campbell - 2nd ed. - New York : Oxford University Press, 2001 - xiv, 603 p. : ill. ; 24 cm. - The Oxford series in electrical and computer engineering .
Includes bibliographical references and index
0195136055 RM84.90
00-051022
Semiconductors--Design and construction