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Nanolithography and patterning techniques in microelectonics /

Nanolithography and patterning techniques in microelectonics / edited by David G. Bucknall - Cambridge, England : Woodhead Pub., 2005 - xiv, 409 p. : ill. ; 24 cm. - Woodhead Publishing in materials .

Includes bibliographical references and index

ISBN: 1855739313 (hbk.) RM1020.80 9781855739314 (hbk.)

Subjects--Topical Terms:
Microlithography
Nanotechnology

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Nanolithography and patterning techniques in microelectonics /

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