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Microsystems technology : fabrication, test & reliability /

Microsystems technology : fabrication, test & reliability / edited by Jumana Boussey. - London ; Sterling, VA : Kogan Page Science, 2003. - vi, 295 p. : ill. ; 25 cm.

ISBN: 1903996473

LCCN: 2003-015993

Subjects--Topical Terms:
Microelectromechanical systems.

LC Class. No.: TK7875 / .M58 2003

Dewey Class. No.: 621.381

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