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CMOS - MEMS /

CMOS - MEMS / volume editors, O. Brand and G. K. Fedder. - Weinheim : Wiley-VCH, 2005. - xiv, 596 p. : ill. ; 25 cm. - Advanced micro & nanosystems ; vol. 2. .

Includes index.

ISBN: 3527310800 RM1,005.00

Subjects--Topical Terms:
Microelectromechanical systems--Design and construction.
Metal oxide semiconductors, complementary--Design and construction.

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