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Micro-optomechatronics /

Micro-optomechatronics / Hiroshi Hosaka ... [et al.]. - New York : Marcel Dekker, 2005 - v, 306 p. : ill. ; 24 cm. - Optical engineering ; v. 92 . - Optical engineering (Marcel Dekker, Inc.) ; v. 92 .

ISBN: 0824759834 (alk. paper) RM544.73

Subjects--Topical Terms:
Microelectromechanical systems
Mechatronics
Nanotechnology

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