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The chemistry of metal CVD /

The chemistry of metal CVD / edited by Toivo T. Kodas and Mark J. Hampden-Smith - Weinheim : VCH, 1994 - xxiv, 530 p. : ill. ; 24 cm.

Bibliography : p. 417-427

ISBN: 3527290710

LCCN: 94-022847

Subjects--Topical Terms:
Electronic circuit design
Chemical vapor deposition
Metallic films

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