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MEMS mechanical sensors /

MEMS mechanical sensors / Stephen Beeby ... [et al.] - Boston : Artech House, 2004 - x, 269 p. : ill. ; 26 cm. - Artech House microelectromechanical system series . - Microelectromechanical systems series .

Includes bibliographical references and index

ISBN: 1580535364 RM264.66

Subjects--Topical Terms:
Microelectromechanical systems
Detectors

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