Fundamentals of semiconductor fabrication /
May, Gary S.
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze - Wiley international ed. - New York : Wiley, 2004 - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index
0471232793 RM88.24
Semiconductors--Design and construction
Integrated circuits--Design and construction
Fundamentals of semiconductor fabrication / Gary S. May, Simon M. Sze - Wiley international ed. - New York : Wiley, 2004 - xiii, 305 p. : ill. ; 26 cm.
Includes bibliographical references and index
0471232793 RM88.24
Semiconductors--Design and construction
Integrated circuits--Design and construction