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Enabling technology for MEMS and nanodevices /

Enabling technology for MEMS and nanodevices / edited by H. Baltes...[et. al] - Weinheim : Wiley VCH, 2004 - 427 p. : ill. ; 25 cm. - Advanced micro & nanosystems ; v.1 .

ISBN: 352730746X RM 920.38

Subjects--Topical Terms:
Nanotechnology
Molecular electronics
Nanostructured materials

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