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Introduction to microfabrication /

Franssila, Sami.

Introduction to microfabrication / Sami Franssila. - Chichester, West Sussex, England : John Wiley & Sons, 2004. - xvii, 401 p. : ill. ; 26 cm.

Includes bibliographical references and index.

ISBN: 0470851058 (cloth) RM482.40 0470851066 (pbk.)

Subjects--Topical Terms:
Microelectromechanical systems.
Electronic apparatus and appliances.
Microfabrication.

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