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Characterization techniques for contaminated gate oxide

Damianou, Christakis Andrea

Characterization techniques for contaminated gate oxide [microform] / by Christakis Andrea Damianou - Ann Arbor, Mich. : University Microfilms International, 1991 - 1 microfiche ; 11 x 15 cm.

Thesis (Ph.D.) - University of Arizona, 1990

Subjects--Topical Terms:
Integrated circuits--Very large scale integration
Metal oxide semiconductors

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Characterization techniques for contaminated gate oxide

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