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Modeling MEMS and NEMS /

Pelesko, John A.

Modeling MEMS and NEMS / John A. Pelesko and David H. Bernstein - Boca Raton, FL : Chapman & Hall/CRC, 2003. - xxiii, 357 p. : ill. ; 24 cm.

Includes bibliographical references and i(p. 325-340) and index.

ISBN: 1584883065 (alk. paper) RM285.13

Subjects--Topical Terms:
Microelectromechanical systems--Mathematical models.

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Modeling MEMS and NEMS /

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