Design, fabrication, and optimization of micromechanical flexures /
Cho, Young-Ho
Design, fabrication, and optimization of micromechanical flexures / by Young-Ho Cho - Berkeley : University of California, 1990 - xvii, 116 p. : ill. ; 18 cm.
Thesis (Ph.D.) - University of California, Berkeley, 1990
References : p. 100-105
RM252.78
University of California, Berkeley--Dissertations
Micromechanics
Microelectromechanical systems
Dissertations, Academic--United States
Design, fabrication, and optimization of micromechanical flexures / by Young-Ho Cho - Berkeley : University of California, 1990 - xvii, 116 p. : ill. ; 18 cm.
Thesis (Ph.D.) - University of California, Berkeley, 1990
References : p. 100-105
RM252.78
University of California, Berkeley--Dissertations
Micromechanics
Microelectromechanical systems
Dissertations, Academic--United States