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Interlayer dielectrics for semiconductor technologies /

Interlayer dielectrics for semiconductor technologies / edited by S. P. Murarka, M. Eizenberg, A. K. Sinha - Amsterdam : Elsevier/Academic Press, 2003 - xiv, 444 p. : ill. ; 25 cm.

Includes index

ISBN: 0125112211 RM743.70

Subjects--Topical Terms:
Dielectrics
Semiconductors

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