Introduction to microelectronic fabrication /
Jaeger, Richard C.
Introduction to microelectronic fabrication / Richard C. Jaeger - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, 2002 - xiv, 316 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5 .
Includes bibliographical references and index
0201444941 RM176.88 9780201444940
Integrated circuits--Very large scale integration--Design and construction--Textbooks
Introduction to microelectronic fabrication / Richard C. Jaeger - 2nd ed. - Upper Saddle River, N.J. : Prentice Hall, 2002 - xiv, 316 p. : ill. ; 24 cm. - Modular series on solid state devices ; v. 5 . - Modular series on solid state devices (Upper Saddle River, N.J.) ; v. 5 .
Includes bibliographical references and index
0201444941 RM176.88 9780201444940
Integrated circuits--Very large scale integration--Design and construction--Textbooks