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Semiconductors for micro and nanotechnology : an introduction for engineers /

Korvink, J. G.

Semiconductors for micro and nanotechnology : an introduction for engineers / Jan G. Korvink and Andreas Greiner. - Weinheim : Wiley-VCH, 2002. - 340 p. : ill. ; 24 cm.

Includes bibliographical references and index.

ISBN: 3527302573 RM241.20

Subjects--Topical Terms:
Semiconductors--Textbooks.
Nanotechnology--Mathematics--Textbooks.
Microtechnology--Mathematics--Textbooks.

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Semiconductors for micro and nanotechnology : an introduction for engineers /

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