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MEMS and microsystems : design and manufacture /

Hsu, Tai-Ran.

MEMS and microsystems : design and manufacture / Tai-Ran Hsu. - Boston : McGraw-Hill, 2002. - xii, 436 p. : ill. ; 24 cm.

Includes bibliographical references (p. 427-431) and index.

ISBN: 0072393912 (alk. paper) RM448.47

Subjects--Topical Terms:
Microelectronics.
Microelectromechanical systems.
Microelectronic packaging.

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