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Microsensors, MEMS, and smart devices /

Gardner, Julian W. 1958-

Microsensors, MEMS, and smart devices / Julian W. Gardner, Vijay K. Varadan, Osama O. Awadelkarim. - Chichester : John Wiley & Sons, 2001. - xvi, 503 p. : ill. ; 25 cm.

Includes bibliographical references and index.

ISBN: 047186109X (alk. paper) RM321.40

Subjects--Topical Terms:
Microelectromechanical systems.
Detectors.
Intelligent control systems.

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