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An introduction to microelectromechanical systems engineering /

Maluf, Nadim.

An introduction to microelectromechanical systems engineering / Nadim Maluf. - Boston : Artech House, 2000. - xix, 265 p. : ill. ; 24 cm. - Artech House microelectromechanical systems library .

Includes bibliographical references and index.

ISBN: 0890065810 (alk. paper) RM421.08

Subjects--Topical Terms:
Microelectromechanical systems.

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