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Nano- and microelectromechanical systems : fundamentals of nano- and microengineering /

Lyshevski, Sergey Edward

Nano- and microelectromechanical systems : fundamentals of nano- and microengineering / Sergey Edward Lyshevski - Boca Raton : CRC Press, 2001 - 338 p. : ill. ; 24 cm. - Nano- and microscience, engineering, technology, and medicine series .

Includes bibliographical references and index

ISBN: 0849309166 (alk. paper) RM377.68

LCCN: 00-057953

Subjects--Topical Terms:
Microelectromechanical systems

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