MEMS and NEMS : systems, devices, and structures /
Lyshevski, Sergey Edward.
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - Boca Raton, FL : CRC Press, 2002. - 461 p. : ill. ; - Nano- and microscience, engineering, technology, and medicine series. .
Includes bibliographical references and index.
0849312620 (hc.) RM401.80
Microelectromechanical systems.
MEMS and NEMS : systems, devices, and structures / Sergey Edward Lyshevski. - Boca Raton, FL : CRC Press, 2002. - 461 p. : ill. ; - Nano- and microscience, engineering, technology, and medicine series. .
Includes bibliographical references and index.
0849312620 (hc.) RM401.80
Microelectromechanical systems.