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An introduction to semiconductor microtechnology /

Morgan, D. V.

An introduction to semiconductor microtechnology / D. V. Morgan, K. Board. - 2nd ed. - Chichester ; New York : John Wiley & Sons, 1990. - xiv, 208 p. : ill. ; 24 cm.

Pesanan Sementara: INTRABAKTI (Buku teks) - Peruntukan 2007

Includes bibliographical references.

ISBN: 0471924784 RM11.30 (xeroxcopy)

LCCN: 89-070572

Subjects--Topical Terms:
Semiconductors--Design and construction.

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An introduction to semiconductor microtechnology /

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