Normal view MARC view ISBD view

Semiconductor lithography: principles, practices, and materials /

Moreau, Wayne M.

Semiconductor lithography: principles, practices, and materials / Wayne M. Moreau. - New York: Plenum Press, 1988. - 931 p. : ill. ; 26 cm.

ISBN: 0306421852

Subjects--Topical Terms:
Semiconductors.
Photoesists.

Place hold
Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Semiconductor lithography: principles, practices, and materials /

Contact Us

Copyright ©The National University of Malaysia Library