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The reliability of ultrathin silicon dioxide

Lee, Kyungho

The reliability of ultrathin silicon dioxide [microform] / Kyungho Lee - Ann Arbor, Mich. : University Microfilms International, 1993 - 2 microfiches ; 11 x 15 cm.

Thesis (Ph.D.) - University of Minnesota, 1993

Subjects--Topical Terms:
Silica

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The reliability of ultrathin silicon dioxide

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