The physics of microfabrication /
Brodie, Ivor
The physics of microfabrication / Ivor Brodie and Julius J. Muray - New York : Plenum Press, 1982 - xix, 503 p. : ill. ; 24 cm.
Includes bibliographical references and index
0306408635
82-3835
Microelectronics
Thin--film circuits
The physics of microfabrication / Ivor Brodie and Julius J. Muray - New York : Plenum Press, 1982 - xix, 503 p. : ill. ; 24 cm.
Includes bibliographical references and index
0306408635
82-3835
Microelectronics
Thin--film circuits