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Micromachining and micropackaging of transducers /

Micromachining and micropackaging of transducers / Clifford D. Fung ... [et al.]. - Amsterdam : Elsevier North-Holland, 1985. - 244 p. : ill. ; 25 cm. - Studies in electrical and electronic engineering ; v.20 .

ISBN: 0444425608

Subjects--Topical Terms:
Transducers--Design and construction.

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Micromachining and micropackaging of transducers /

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