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Microlithography : process technology for ic fabrication /

Elliott, David J.

Microlithography : process technology for ic fabrication / David J. Elliott. - New York : Mc Graw-Hill Book Company, 1986. - 378 p. : ill. ; 26 cm.

ISBN: 0070193045

Subjects--Topical Terms:
Integrated circuits--Very large scale integration--Design and construction.
Microlithography.
Photo resists.

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Microlithography : process technology for ic fabrication /

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