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Microelectronics processing : chemical engineering aspects /

Microelectronics processing : chemical engineering aspects / Dennis W. Hess and Klaus F. Jensen ; editors. - Washington, D.C. : American Chemical Society , 1989. - 547 p. : ill. ; 23 cm. - Advances in chemistry series ; v.221 .

ISBN: 0841214751 RM133.49

Subjects--Topical Terms:
Microelectronics--Materials.
Integrated circuits--Design and construction.
Surface chemistry.

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