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Materials and process characterization for VSLI, 1988 (ICMPC`88) proceedings ...

Materials and process characterization for VSLI, 1988 (ICMPC'88) proceedings ... editors X-F Zong, Y-Y Wang, J Chen - Singapore : World Scientific ; 1988 - 531 p. : ill. ; 22 cm.

ISBN: 9971506882

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