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Ion implantation techniques : lectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 /

Ion implantation techniques : lectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 / editors, H. Rysell and H. Glawischnig. - Berlin : Springer-Verlag, 1982 - 372 p. ill. ; 23 cm. - Springer series in electrophysics ; 10 . - Springer series in electrophysics ; 10 .

ISBN: 3540118780

Subjects--Topical Terms:
Ion Implantation--Addresses, essays, lectures
Semiconductor doping--Addresses, essays, lectures

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Ion implantation techniques : lectures given at the Ion Implantation School in connection with the Fourth International Conference on Ion Implantation : Equipment and Techniques, Bertchtesgaden, Feb. Rep. of Germany, September 13-15, 1982 /

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