Normal view MARC view ISBD view

Ion implantation, sputtering and their applications /

Townsend, P. D.

Ion implantation, sputtering and their applications / by P. D. Townsend, J. C. Kelly, N. E. W. Hartley. - London : Academic Press, 1976 - 333 p. : ill. ; 24 cm.

includes bibliographical reference

ISBN: 0126969507

Subjects--Topical Terms:
Ion implantation.
Sputtering (Physics).

Place hold
Print
Save record
BIBTEX Dublin Core MARCXML MARC (non-Unicode/MARC-8) MARC (Unicode/UTF-8) MARC (Unicode/UTF-8, Standard) MODS (XML) RIS ISBD
More searches

Search for this title in:
Other Libraries (WorldCat) Other Databases (Google Scholar) Online Stores (Bookfinder.com) Open Library (openlibrary.org)

Ion implantation, sputtering and their applications /

Contact Us

Copyright ©The National University of Malaysia Library