Ion implantation range and energy deposition distributions /
Brice, David K.
Ion implantation range and energy deposition distributions / David K. Brice. - New York : Plenum Press, 1975 - 2 v. : ill. ; 28 cm.
Includes bibliographical references.
High incident ion energies - Low incident ion energies. v. 1 v.2
0306674017 (v.1) 0306674025 (v.2)
Ion implantation.
Ion implantation range and energy deposition distributions / David K. Brice. - New York : Plenum Press, 1975 - 2 v. : ill. ; 28 cm.
Includes bibliographical references.
High incident ion energies - Low incident ion energies. v. 1 v.2
0306674017 (v.1) 0306674025 (v.2)
Ion implantation.