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Ion implantation in semiconductors and other materials /

Ion implantation in semiconductors and other materials / edited by Billy L. Crowder. - New York : Plenum Press, 1973 - xii, 657 p. : ill. ; 26 cm. - The IBM research symposia series. . - The IBM research symposia series. .

Includes bibliographical references.

ISBN: 0306307561

Subjects--Topical Terms:
Ion implantation--Congresses.
Semiconductors--Congresses.

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