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Ion implantation in microelectronics : a comprehensive bibliography,

Agajanian, A. H.

Ion implantation in microelectronics : a comprehensive bibliography, A.H. Agajanian - New York : IFI/Plenum, 1981 - 255 p. : ill. ; 25 cm. - Computer science information guides ; v.1 .

ISBN: 030665198X

Subjects--Topical Terms:
Semiconductor doping--Bibliography.
Ion implantation--Bibliography.

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Ion implantation in microelectronics : a comprehensive bibliography,

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