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Ion bombardment modification of surfaces : fundamentals and applications /

Ion bombardment modification of surfaces : fundamentals and applications / edited by Orlando Auciello and Roger Kelly. - Amsterdam : Elsevier North-Holland, 1984 - 466 p. : ill. ; 25 cm. - Beam modification of materials ; 1 . - Beam modification of materials ; 1 .

ISBN: 0444423656

Subjects--Topical Terms:
Surfaces (Technology).
Ion bombardment.
Ion implantation.
Sputtering (Physics).

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Ion bombardment modification of surfaces : fundamentals and applications /

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